Semitron® CMP XL20 - Wear Resistant PAI

Semitron® CMP XL20 was developed from a proprietary polyamide-base resin and offers wear life more than 20 times that of standard PPS in all CMP chemistry environments. This material has the best combination of wear life, and mechanical strength and stiffness, ideal for the most demanding applications and in extreme process environments.

Material Properties

High strength and stiffness promotes fewer edge defects and better uniformity

Good chemical and creep resistance

Excellent wear life

Dimensionally stable

Outperforms PPS up to 20x in most processes

Available Geometries

Semitron® CMP XL20 PAI stock shapes encompass a range of standard sizes in the following geometries: Rod, Plate

Available Colors

Semitron® CMP XL20 PAI stock shapes come in the following colors: Green

Key Properties

Significantly lower cost per wafer

Outperforms PPS up to 20x in most processes

High strength and stiffness promotes fewer edge defects and better uniformity

Applications

CMP Retaining Rings

Typical Properties of Semitron ® CMP XL20 PAI