Semitron® MPR 1000 PAI

Semitron® MPR 1000 shapes possess excellent heat resistance and low rates of outgassing and erosion in plasma chambers. This high purity material with low ionic content is often chosen for vacuum chamber applications within etch, CVD, and ion implant sub segmentations in the semiconductor and electronics industry.

Semitron® MPR 1000 shows increased lifetime over traditional materials, for example up to 25x over polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.

Material Properties

Low ionic content & low outgassing

Excellent heat resistance

Minimized rate of erosion in plasma chambers

Optimal chip resistance, durability, and machinability

Designed specifically for demanding chamber applications

Applications: Plasma Based Vacuum Chambers, Clamp Rings, Trench Rings, Screws, Pins, Shower Heads, Focus Rings, Insulators, Vacuum Pads

About Semitron ®

The Semitron® Semiconductor Grade products were developed to help designers and users optimize the performance of device manufacturing equipment.  In addition to device manufacture, many of these materials are ideal for specific environments where wear-resistance, chemical-resistance and the management of static electricity are required.

Two groups of products have been developed.  One, well suited for device handling and test applications, and a second for next-generation CMP, plasma and etch chamber applications.

Semitron grades are available in sheet, rod (some formulations) and machined parts.