medical equipment /Leakage detection use mass flow sensor FS4000 series

    FS4000 has flow channel diameter of 3 mm. This sensors have a very low pressure loss while it can measure air flow up to 5 SLPM.   Applications 
leakage detection particle counter
analytical instrumentation.   Overview FS4000 series mass flow sensors are designed for general purpose flow monitor and control 
applications, and are made with Siargo's world leading proprietary MEMS mass flow sensors and 
the smart electronic control system.   The sensors directly measure mass flow in the designed channel with a  low pressure loss.   These sensors can readily  be applied for electronics flow meters for anesthesia equipments, clean room air flow or nitrogen flush monitor and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.

FS4003 has a flow channel diameter of 3 mm. This sensors have a very low pressure loss while it 
can measure air flow up to 5 SLPM.   Applications include leakage detection,  particle counter, and 
analytical instrumentation.     Features and Applications
- Designed for 3 and 8 mm package
- Mass flow detectable from 0 ~ 2 SLPM to 0 ~ 50 SLPM
- Exchangeable connectors for easy installation
- Digital and analog output provide easy access for various communications
- Compact design ready for multiple channel assembly
- Excellent for electronic meters in anesthesia equipment
- Fast response and low power consumption
- Low pressure loss