MEMS Thermal Mass Flow Sensor Gas Flow Sensors FS1015CL

MEMS Thermal Mass Flow Sensor Gas Flow Sensors FS1015CL   Features (1) Mass flow range: 0 ~ 100 SLPM, 0 ~ 150 SLPM (2) Fast response time: 8 ms (max.) (3) Highly sensitive in small flow rate (4) Low power consumption Specially designed for medical equipment (5) Small form factor   Working Principle   (1) The MEMS sensor chip utilizes the calorimetric principle.   (2) It is packaged on a plate installed inside the flow channel, which provides additional flow conditioning from the boundary layer configuration resulting in a laminar flow.   (3) The mass flow measurement is established as the gas carries heat away from the heater leading to the redistribution of the temperature field.   (4) Accurate flow rate is obtained by calibration with standard gas at preset conditions.     MEMS Thermal Mass Flow Sensor Gas Flow Sensors FS1015CL Order info